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carl zeiss smt | 6724 |
zeiss carl smt | 287 |
asml netherlands | 230 |
carl zeiss sms | 145 |
applied materials israel | 119 |
carl zeiss microscopy | 79 |
carl zeiss nts | 47 |
carl zeiss | 44 |
carl zeiss laser optics | 40 |
nawotec | 17 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
catadioptric projection objective | 53 | 2004 |
polarization-modulating optical element | 45 | 2004 |
particle-optical systems and arrangements and particle-optical components for such syste… 🛈 | 42 | 2003 |
optical integrator for an illumination system of a microlithographic projection exposure… 🛈 | 36 | 2006 |
illumination system of a microlithographic projection exposure apparatus | 31 | 2013 |
projection exposure apparatus with optimized adjustment possibility | 30 | 2008 |
catadioptric projection objective with intermediate images | 30 | 2004 |
particle-optical component | 30 | 2005 |
microlithography projection objective | 28 | 2005 |
device for controlling temperature of an optical element | 27 | 2007 |