How many patents does
Advanced Micro-Fabrication Equipment have?

patents
1,213
families
420
granted
414
applications
799
CN
635
US
39
KR
34
JP
12
WO
2
RoW
491

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The report contains ten-year analysis with the following sections

  • patent filing analysis
  • worldwide filing analysis
  • patent family analysis
  • application analysis
  • granted analysis
  • classification analysis
  • citation analysis

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Advanced Micro-Fabrication Equipment
Top ten assignees appearing on patents

Advanced Micro-Fabrication Equipment
The top ten patent families are

Title of patent family
(most common patent title)
Family
members
Filing
year
chemical vapor deposition or epitaxial-layer growth reactor and supporter thereof 11 2011
gas showerhead, method for making the same and thin film growth reactor 10 2012
apparatus and method for controlling heating of base within chemical vapour deposition c… 🛈 9 2012
processing chamber, combination of processing chamber and loadlock, and system for proce… 🛈 8 2015
gas shower device, chemical vapor deposition device and method 8 2014
method and device for measuring temperature of substrate in vacuum processing apparatus 7 2012
electrode structure for icp etcher 7 2015
coating packaged chamber parts for semiconductor plasma apparatus 7 2012
cleaning apparatus and method, and film growth reaction apparatus and method 7 2011
plasma reactor and method for manufacturing semiconductor substrate 7 2012