The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
polishing apparatus and polishing method | 40 | 2007 |
polishing apparatus | 36 | 2004 |
plating method and apparatus | 31 | 2012 |
water supply | 26 | 2008 |
plating apparatus and plating method | 23 | 2007 |
substrate processing apparatus, substrate processing method, substrate holding mechanism… 🛈 | 21 | 2008 |
polishing apparatus and polishing method | 20 | 2011 |
polishing monitoring method, polishing method, and polishing monitoring apparatus | 20 | 2010 |
polishing apparatus | 19 | 2007 |
sample observation method and apparatus, and inspection method and apparatus using the s… 🛈 | 18 | 2008 |