The report contains ten-year analysis with the following sections
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ev group | 238 |
ev group e. thallner | 3 |
ev group e. thallner | 1 |
ev group | 1 |
ev group | 6 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
device and method for detaching a semiconductor wafer from a substrate | 38 | 2009 |
device and method for stripping a product substrate off a carrier substrate | 33 | 2010 |
chuck that can be coupled in an automated manner | 26 | 2010 |
device and method for detaching a wafer from a carrier | 25 | 2009 |
device and method for processing wafers | 18 | 2010 |
die tool, device and method for producing a lens wafer | 16 | 2010 |
method and device for producing a micro-lens | 15 | 2010 |
method and device for producing a lens wafer | 14 | 2010 |
device for aligning and pre-attaching a wafer | 14 | 2009 |
device and method for separating a substrate from a carrier substrate | 14 | 2009 |