The report contains ten-year analysis with the following sections
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gigaphoton | 1156 |
komatsu | 117 |
ushio | 8 |
ckd corporation | 5 |
ebara corporation | 5 |
topcon corporation | 4 |
ushio denki | 3 |
komatsu ltd./gigaphoton | 3 |
cdk company | 1 |
gigaphonton | 1 |
gigaphoton | 33 |
komatsu | 20 |
ushio | 3 |
gigaphoton | 121 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
extreme-ultraviolet light source device and method for generating extreme-ultraviolet li… 🛈 | 22 | 2010 |
system and method for generating extreme ultraviolet light, and laser apparatus | 17 | 2010 |
gas laser device | 15 | 2013 |
extreme ultraviolet light generator | 14 | 2010 |
mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra viole… 🛈 | 13 | 2008 |
extreme ultraviolet light generation apparatus | 12 | 2011 |
alignment system and extreme ultraviolet light generation system | 12 | 2011 |
laser system | 12 | 2014 |
laser system | 11 | 2014 |
chamber apparatus and extreme ultraviolet light generation system | 10 | 2010 |