How many patents does
Mattson Technology have?

patents
436
families
85
granted
154
applications
282
US
156
WO
55
KR
52
CN
50
JP
34
EP
11
RoW
78

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The report contains ten-year analysis with the following sections

  • patent filing analysis
  • worldwide filing analysis
  • patent family analysis
  • application analysis
  • granted analysis
  • classification analysis
  • citation analysis

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Mattson Technology
Top ten assignees appearing on patents

Mattson Technology
The top ten patent families are

Title of patent family
(most common patent title)
Family
members
Filing
year
motion simulation chair 15 2007
advanced multi-workpiece processing chamber 14 2007
system and method for protection of vacuum seals in plasma processing systems 12 2013
electrostatic chuck system and process for radially tuning the temperature profile acros… 🛈 12 2009
methods for determining wafer temperature 11 2006
apparatus and methods for generating electromagnetic radiation 11 2012
novel mask removal process strategy for vertical nand device 10 2013
method for forming microlenses 9 2012
high efficiency plasma source 9 2011
system and process for calibrating pyrometers in thermal processing chambers 9 2002