The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
optical metrology system for spectral imaging of a sample | 13 | 2013 |
capacitive displacement transducer | 11 | 2009 |
force-feedback seismometer | 11 | 2009 |
simultaneous measurement of multiple overlay errors using diffraction based overlay | 9 | 2010 |
ellipsometer focusing system | 8 | 2011 |
modeling conductive patterns using an effective model | 8 | 2008 |
device for purging a calibration chip inspected by optical metrology | 7 | 2014 |
optical metrology on textured samples | 7 | 2009 |
diffraction based overlay linearity testing | 7 | 2010 |
simulating two-dimensional periodic patterns using compressed fourier space | 7 | 2009 |