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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
multi particle beam writing method and multi particle beam writing device | 19 | 2012 |
multi charged particle beam writing apparatus and multi charged particle beam writing me… 🛈 | 13 | 2011 |
curvature measurement apparatus and method | 12 | 2014 |
charged particle beam writing apparatus, method of adjusting beam incident angle to targ… 🛈 | 11 | 2013 |
dampfphasenepitaxievorrichtung und dampfphasenepitaxieverfahren | 11 | 2013 |
defect estimation device and method and inspection system and method | 10 | 2010 |
inspection system and method for inspecting line width and/or positional errors of a pat… 🛈 | 10 | 2010 |
defect detecting method | 10 | 2012 |
vapor phase growth method | 10 | 2014 |
multi charged particle beam writing method, and multi charged particle beam writing appa… 🛈 | 10 | 2014 |