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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
pressure-based flow control device with flow monitor, fluid-supply-system anomaly detect… 🛈 | 23 | 2011 |
fastening device for lower tier members and fluid control device furnished with same | 15 | 2011 |
accumulation-type gas supply device | 14 | 2012 |
diaphragm valve | 14 | 2013 |
flow rate measurement device and flow rate measurement method of flow rate controller fo… 🛈 | 13 | 2011 |
fluid coupling and retainer for fluid coupling | 13 | 2008 |
flow meter and flow control device provided therewith | 13 | 2013 |
fastening structure for brittle-fracturable panel, and method for fastening light transm… 🛈 | 13 | 2013 |
fluid controller actuator | 13 | 2012 |
vacuum valve | 13 | 2013 |