The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
automated material handling system for semiconductor manufacturing based on a combinatio… 🛈 | 27 | 2002 |
transport system and transport method | 22 | 2010 |
parallel mechanism | 16 | 2008 |
access to one or more levels of material storage shelves by an overhead hoist transport … 🛈 | 16 | 2002 |
storage shelf | 16 | 2013 |
overhead transport vehicle | 15 | 2011 |
travel wheel degradation detection method and detection system, and travel carriage | 15 | 2014 |
travelling vehicle system and method for controlling travel of travelling vehicle in cur… 🛈 | 15 | 2012 |
moving body system and drive method of moving body | 15 | 2013 |
stocker provided with purging functionality, stocker unit, and method for supplying clea… 🛈 | 15 | 2012 |