The report contains ten-year analysis with the following sections
contact us for pricing
Check out our sample pages |
Many companies now available
Search to find companies of interest
read summary of their published patent
the company report contains more information
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
stage drive method and stage unit, exposure apparatus, and device manufacturing method | 138 | 2004 |
apparatus and method for maintaining immersion fluid in the gap under the projection len… 🛈 | 132 | 2003 |
exposure apparatus, and device manufacturing method | 129 | 2003 |
environmental system including a transport region for an immersion lithography apparatus | 119 | 2003 |
movable body drive method, movable body drive system, pattern formation method, pattern … 🛈 | 102 | 2006 |
exposure apparatus, exposure method, and method for producing device | 101 | 2003 |
movable body drive method and movable body drive system, pattern formation method and ap… 🛈 | 96 | 2006 |
projection exposure apparatus, exposure method, and element producing method | 87 | 2003 |
exposure apparatus, method for manufacturing device, and method for controlling exposure… 🛈 | 87 | 2003 |
mobile body drive system and mobile body drive method, pattern formation apparatus and m… 🛈 | 86 | 2006 |