How many patents does
Tel Epion have?

patents
305
families
81
granted
111
applications
194
US
158
WO
35
KR
20
JP
14
EP
12
CN
12
RoW
54

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The report contains ten-year analysis with the following sections

  • patent filing analysis
  • worldwide filing analysis
  • patent family analysis
  • application analysis
  • granted analysis
  • classification analysis
  • citation analysis

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Tel Epion
Top ten assignees appearing on patents

2009 - 2018

tel epion 276
tel nexx 8
tokyo electron 5

2018

tel epion 9

Tel Epion
The top ten patent families are

Title of patent family
(most common patent title)
Family
members
Filing
year
multiple nozzle gas cluster ion beam system and method 14 2009
gcib nozzle assembly 14 2014
method for increasing adhesion of copper to polymeric surfaces 10 2013
gas cluster ion beam etching process for achieving target etch process metrics for multi… 🛈 10 2011
method to alter silicide properties using gcib treatment 10 2009
process gas enhancement for beam treatment of a substrate 9 2014
gas cluster ion beam system with rapid gas switching apparatus 9 2010
method to improve electrical leakage performance and to minimize electromigration in sem… 🛈 9 2007
method for growing a thin film using a gas cluster ion beam 8 2008
molecular beam enhanced gcib treatment 8 2013