The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
scattering plate, grinding wheel, and grinding device | 12 | 2013 |
semiconductor wafer manufacturing method | 11 | 2012 |
method and device for polishing semiconductor wafer | 10 | 2013 |
semiconductor wafer manufacturing method | 10 | 2007 |
single crystal silicon pulling apparatus, method for preventing contamination of silicon… 🛈 | 9 | 2005 |
location measurement device in semiconductor single crystal manufacturing device, and lo… 🛈 | 8 | 2007 |
silicon single crystal pull-up apparatus and process for producing silicon single crystal | 8 | 2008 |
semiconductor wafer processing method and apparatus | 8 | 2008 |
method for producing single crystal, and method for producing silicon wafer | 8 | 2013 |
susceptor for vapor phase epitaxial growth device | 8 | 2008 |