The report contains ten-year analysis with the following sections
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tes company | 399 |
apet company | 8 |
t&materials company | 1 |
tes company | 45 |
tes company | 6 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
apparatus for transferring substrate | 13 | 2012 |
thin-film vapour deposition device | 9 | 2013 |
method for manufacturing battery protection apparatus and battery protection apparatus | 8 | 2013 |
plasma processing apparatus | 8 | 2008 |
thin film deposition apparatus | 7 | 2014 |
electrode device and apparatus for generating plasma | 7 | 2009 |
substrate processing system and substrate processing method using the same | 6 | 2011 |
substrate processing apparatus, method for forming an amorphous carbon film using same, … 🛈 | 6 | 2011 |
solar cell module | 6 | 2013 |
method for selective etching of silicon oxide film | 6 | 2016 |