The report contains ten-year analysis with the following sections
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ultratech | 508 |
ibm (international business machin… 🛈 | 72 |
cambridge nanotech | 26 |
ultratech stepper | 2 |
orion labs | 1 |
ultratech | 34 |
orion labs | 1 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
formation of heteroepitaxial layers with rapid thermal processing to remove lattice disl… 🛈 | 21 | 2013 |
laser spike annealing for gan leds | 20 | 2009 |
laser annealing systems and methods with ultra-short dwell times | 18 | 2012 |
improved plasma enhanced ald system | 17 | 2013 |
solder interconnect pads with current spreading layers | 15 | 2008 |
through silicon via and method of fabricating same | 15 | 2008 |
method and apparatus for forming device quality gallium nitride layers on silicon substr… 🛈 | 14 | 2013 |
two-beam laser annealing with improved temperature performance | 13 | 2012 |
electrical interconnect structure and method of forming the same | 13 | 2007 |
through silicon via lithographic alignment and registration | 13 | 2010 |