The report contains ten-year analysis with the following sections
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veeco instruments | 75 |
veeco instr | 5 |
dow chemical company | 1 |
emcore corporation | 1 |
veeco instruments | 48 |
bruker nano | 7 |
plansee se | 2 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
method and apparatus of operating a scanning probe microscope | 47 | 2008 |
method for improving performance of a substrate carrier | 25 | 2009 |
chemical vapor deposition flow inlet elements and methods | 23 | 2008 |
keyed wafer carrier | 21 | 2012 |
vapor phase epitaxy system | 21 | 2008 |
rotating disk reactor with ferrofluid seal for chemical vapor deposition | 19 | 2012 |
wafer processing with carrier extension | 18 | 2010 |
apparatus and method for batch non-contact material characterization | 18 | 2008 |
vacuum deposition sources having heated effusion orifices | 16 | 2008 |
alkyl push flow for vertical flow rotating disk reactors | 16 | 2003 |