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air products and chemicals | 585 |
versum materials us | 279 |
dynaloy | 30 |
air products and chemicals | 24 |
versum materials us | 197 |
air products and chemicals | 20 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
organoaminodisilane precursors and methods for depositing films comprising same | 44 | 2012 |
process for producing silicon oxide films from organoaminosilane precursors | 36 | 2006 |
method for removal of carbon from an organosilicate material | 26 | 2008 |
method and equipment for selectively collecting process effluent | 23 | 2010 |
ultrasonic liquid level sensing systems | 23 | 2013 |
organoaminosilane precursors and methods for depositing films comprising same | 22 | 2013 |
process for making trisilylamine | 22 | 2013 |
compositions and processes for depositing carbon-doped silicon-containing films | 21 | 2011 |
compositions and methods using same for deposition of silicon-containing films | 21 | 2014 |
chemical mechanical polishing (cmp) composition for shallow trench isolation (sti) appli⦠🛈 | 20 | 2012 |