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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
multiple silicon trenches forming method for mems sealing cap wafer and etching mask str… 🛈 | 6 | 2012 |
isolation structure and manufacturing method thereof for high-voltage device in a high-v… 🛈 | 6 | 2012 |
cavity film piezoresistive pressure sensor and manufacturing method thereof | 2 | 2014 |
groove shape monitoring method and groove shape monitoring structure manufacturing method | 2 | 2014 |
inertial sensor and manufacturing method thereof | 2 | 2015 |
device accomplished by adopting bipolar low-pressure process and manufacturing method th… 🛈 | 2 | 2012 |
high-voltage withstanding device in bipolar low-voltage process and manufacturing method… 🛈 | 2 | 2012 |
photon-assisted porous silicon electrochemical etching tank | 2 | 2012 |
mems pressure sensor and packaging method thereof | 2 | 2014 |
diode structure and manufacturing method thereof | 2 | 2014 |