The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
methods of forming electronic devices | 60 | 2009 |
compositions and processes for immersion lithography | 29 | 2005 |
compositions and processes for photolithography | 26 | 2006 |
compositions and processes for immersion lithography | 20 | 2006 |
electrochemically deposited indium composites | 18 | 2007 |
photoresist comprising nitrogen-containing compound | 18 | 2010 |
compositions comprising block copolymer and processes for photolithography | 18 | 2008 |
vapor delivery device, methods of manufacture and methods of use thereof | 17 | 2012 |
photoacid generators and photoresists comprising same | 17 | 2009 |
method of cleaning and micro-etching semiconductor wafers | 17 | 2009 |