The report contains ten-year analysis with the following sections
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asm america | 425 |
asm international | 47 |
asm ip holding | 34 |
asm | 29 |
s.o.i.tec silicon on insulator tec… 🛈 | 8 |
asm int | 2 |
asm ip holding b v | 1 |
asm aemrica | 1 |
soitec | 1 |
asm america | 86 |
asm | 6 |
s.o.i.tec silicon on insulator tec… 🛈 | 5 |
asm international | 1 |
asm aemrica | 1 |
asm ip holding | 13 |
asm america | 4 |
asm international | 2 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
synthesis and use of precursors for ald of tellurium and selenium thin films | 20 | 2008 |
synthesis and use of precursors for ald of group va element containing thin films | 17 | 2009 |
selective formation of metallic films on metallic surfaces | 17 | 2010 |
plasma-enhanced atomic layer deposition of conductive material over dielectric layers | 15 | 2009 |
semiconductor processing reactor and components thereof | 15 | 2009 |
systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxyg… 🛈 | 12 | 2009 |
method and apparatus for minimizing contamination in semiconductor processing chamber | 12 | 2009 |
separate injection of reactive species in selective formation of films | 11 | 2007 |
reaction chamber | 11 | 2008 |
selective epitaxial formation of semiconductor films | 11 | 2006 |