How many patents does
Axcelis Technologies have?
patents
1,128
families
268
granted
449
applications
679
US
301
CN
195
KR
128
WO
119
JP
80
EP
65
RoW
240
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The report contains ten-year analysis with the following sections
- patent filing analysis
- worldwide filing analysis
- patent family analysis
- application analysis
- granted analysis
- classification analysis
- citation analysis
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Axcelis Technologies
Top ten assignees appearing on patents
2009 - 2018
| axcelis technologies | 817 |
| axcelis tech | 107 |
| lam research corporation | 14 |
| reynolds, william | 2 |
| axcelis techenologies | 1 |
| acelis technologies. | 1 |
| axcelis technologiesm | 1 |
| axcebs technologies | 1 |
2009
| axcelis technologies | 107 |
| axcelis tech | 28 |
| axcebs technologies | 1 |
2018
| axcelis technologies | 60 |
Axcelis Technologies
The top ten patent families are
|
Title of patent family (most common patent title) |
Family members |
Filing year |
|---|---|---|
| gas bearing eletrostatic chuck | 14 | 2008 |
| heated electrostatic chuck including mechanical clamp capability at high temperature | 13 | 2010 |
| system and method for ion implantation with improved productivity and uniformity | 12 | 2011 |
| low contamination, low energy beamline architecture for high current ion implantation | 12 | 2008 |
| method for reciprocating a workpiece through an ion beam | 12 | 2004 |
| method and apparatus for measurement of beam angle in ion implantation | 11 | 2008 |
| system and method of controlling broad beam uniformity | 11 | 2008 |
| post-decel magnetic energy filter for ion implantation systems | 11 | 2008 |
| method and apparatus for cleaning residue from an ion source component | 11 | 2009 |
| method and apparatus for improved uniformity control with dynamic beam shaping | 11 | 2011 |