How many patents does
Carl Zeiss Sms have?

patents
572
families
132
granted
224
applications
348
US
192
WO
67
EP
51
KR
50
JP
37
CN
16
RoW
159

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The report contains ten-year analysis with the following sections

  • patent filing analysis
  • worldwide filing analysis
  • patent family analysis
  • application analysis
  • granted analysis
  • classification analysis
  • citation analysis

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Carl Zeiss Sms
Top ten assignees appearing on patents

Carl Zeiss Sms
The top ten patent families are

Title of patent family
(most common patent title)
Family
members
Filing
year
method for processing an object with miniaturized structures 15 2008
method and apparatus for analyzing and for removing a defect of an euv photomask 14 2011
method for electron beam induced etching 13 2008
methods and systems for removing a material from a sample 13 2007
method and apparatus for processing a substrate with a focussed particle beam 12 2011
method for electron beam induced etching of layers contaminated with gallium 12 2008
method and apparatus for correcting errors on a wafer processed by a photolithographic m… 🛈 11 2010
method for electron beam induced deposition of conductive material 11 2008
method for determining a repair shape of a defect on or in the vicinity of an edge of a … 🛈 9 2008
apparatus and method for investigating or modifying a surface with a beam of charged par… 🛈 9 2004