The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
chamber for heat treatment equipment and heat treatment equipment | 11 | 2013 |
heat treatment apparatus | 10 | 2009 |
heat treatment apparatus | 10 | 2010 |
substrate processing system and substrate processing method | 9 | 2009 |
heat treatment apparatus | 8 | 2009 |
fluid supply device | 8 | 2016 |
tank cooling device | 8 | 2015 |
heating unit and heat processing device | 7 | 2008 |
substrate support member and substrate storage device | 7 | 2010 |
heat treatment device | 7 | 2008 |