The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
method and system for measuring patterned structures | 21 | 1999 |
optical metrology for in-situ measurements | 19 | 2012 |
method and system for use in monitoring properties of patterned structures | 17 | 2007 |
method and system for optimizing optical inspection of patterned structures | 15 | 2010 |
optical system and method for measuring in three-dimensional structures | 14 | 2011 |
lateral shift measurement using an optical technique | 11 | 2000 |
raman spectroscopy based measurements in patterned structures | 11 | 2015 |
methods and systems for measuring periodic structures using multi-angle x-ray reflectanc… 🛈 | 11 | 2014 |
silicon germanium thickness and composition determination using combined xps and xrf tec… 🛈 | 10 | 2014 |
monitoring apparatus and method particularly useful in photolithographically processing … 🛈 | 9 | 1998 |