How many patents does
Novellus Systems have?
patents
1,957
families
400
granted
816
applications
1,141
US
955
KR
236
CN
179
WO
106
JP
77
EP
7
RoW
397
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The report contains ten-year analysis with the following sections
- patent filing analysis
- worldwide filing analysis
- patent family analysis
- application analysis
- granted analysis
- classification analysis
- citation analysis
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Novellus Systems
Top ten assignees appearing on patents
Novellus Systems
The top ten patent families are
|
Title of patent family (most common patent title) |
Family members |
Filing year |
|---|---|---|
| plasma activated conformal film deposition | 59 | 2010 |
| control of electrolyte hydrodynamics for efficient mass transfer during electroplating | 24 | 2010 |
| apparatus for wetting pretreatment for enhanced damascene metal filling | 24 | 2009 |
| methods for depositing ultra thin low resistivity tungsten film for small critical dimen… 🛈 | 23 | 2009 |
| depositing tungsten into high aspect ratio features | 21 | 2009 |
| lipseals and contact elements for semiconductor electroplating apparatuses | 21 | 2011 |
| tungsten feature fill | 19 | 2012 |
| purging of porogen from uv cure chamber | 19 | 2005 |
| hybrid ceramic showerhead | 18 | 2011 |
| method and apparatus for electroplating | 18 | 2006 |