The report contains ten-year analysis with the following sections
contact us for pricing
Check out our sample pages |
Many companies now available
Search to find companies of interest
read summary of their published patent
the company report contains more information
lam research corporation | 9674 |
novellus systems | 198 |
sez | 52 |
axcelis technologies | 38 |
mui david s. l. | 36 |
ceradyne | 8 |
globalfoundries | 7 |
united microelectronics corporation | 7 |
foi | 6 |
kistler, rodney | 5 |
lam research corporation | 898 |
sez | 41 |
mui david s. l. | 10 |
foi | 6 |
ceradyne | 3 |
axcelis technologies | 2 |
blue29 corporation | 2 |
kistler, rodney | 2 |
axcelis tech | 1 |
scient systems res | 1 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
methods for constructing an optimal endpoint algorithm | 68 | 2009 |
method and apparatus for cleaning a semiconductor substrate | 64 | 2005 |
frequency enhanced impedance dependent power control for multi-frequency rf pulsing | 62 | 2012 |
plasma activated conformal film deposition | 59 | 2010 |
controls of ambient environment during wafer drying using proximity head | 52 | 2000 |
materials for particle removal by single-phase and two-phase media | 46 | 2007 |
methods and apparatus for detecting the confinement state of plasma in a plasma processi… 🛈 | 34 | 2009 |
internal plasma grid for semiconductor fabrication | 33 | 2013 |
systems for removing and replacing consumable parts from a semiconductor process module … 🛈 | 30 | 2015 |
e-beam enhanced decoupled source for semiconductor processing | 29 | 2011 |