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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
organosilane precursors for ald/cvd silicon-containing film applications | 30 | 2012 |
preparation of lanthanide-containing precursors and deposition of lanthanide-containing … 🛈 | 29 | 2008 |
method and system for heat recovery from products of combustion and charge heating insta… 🛈 | 22 | 2012 |
heteroleptic pyrrolecarbaldimine precursors | 21 | 2011 |
distributed combustion process and burner | 20 | 2010 |
heteroleptic cyclopentadienyl transition metal precursors for deposition of transition m… 🛈 | 20 | 2008 |
fluorocarbon molecules for high aspect ratio oxide etch | 19 | 2012 |
plasma generation of co for modified atmosphere packaging | 17 | 2010 |
distributed combustion process and burner | 15 | 2010 |
titanium-containing precursors for vapor deposition | 15 | 2010 |