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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
method of manufacturing semiconductor device and substrate processing apparatus | 42 | 2008 |
method of manufacturing semiconductor device, method of processing substrate, substrate … 🛈 | 20 | 2011 |
method of manufacturing semiconductor device and substrate processing apparatus | 19 | 2008 |
heating device, substrate processing apparatus, and method of manufacturing semiconducto… 🛈 | 19 | 2009 |
method of manufacturing semiconductor device and substrate processing apparatus | 19 | 2009 |
producing method of semiconductor device and substrate processing apparatus | 19 | 2003 |
method of manufacturing semiconductor device, method of processing substrate and substra… 🛈 | 16 | 2010 |
method of manufacturing semiconductor device, substrate processing apparatus, and recodi… 🛈 | 16 | 2012 |
method of manufacturing semiconductor device, substrate processing apparatus, and record… 🛈 | 16 | 2013 |
method of manufacturing semiconductor device and method of processing substrate | 16 | 2011 |