The report contains ten-year analysis with the following sections
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intevac | 522 |
solar implant technologies | 20 |
brooks automation | 7 |
delta nu | 2 |
intevac incorporation | 1 |
intevac | 67 |
solar implant technologies | 8 |
delta nu | 2 |
intevac | 36 |
Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
system and method for dual-sided sputter etch of substrates | 30 | 2007 |
linear scanning sputtering system and method | 25 | 2011 |
formation of solar cell-selective emitter using implant and anneal method | 24 | 2008 |
plasma grid implant system for use in solar cell fabrications | 23 | 2009 |
substrate processing system and method | 22 | 2011 |
collimator bonding structure and method | 20 | 2010 |
system architecture for vacuum processing | 17 | 2012 |
sputtering system and method using counterweight | 17 | 2011 |
apparatus and methods for transporting and processing substrates | 16 | 2006 |
dual-mask arrangement for solar cell fabrication | 16 | 2012 |