The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
methods and systems for controlling a semiconductor fabrication process | 57 | 2003 |
substrate container storage system | 38 | 2009 |
semiconductor cleaner systems and methods | 28 | 2011 |
automated material handling system for semiconductor manufacturing based on a combinatio… 🛈 | 27 | 2002 |
automated system for storing, retreiving and managing samples | 27 | 2006 |
semiconductor stocker systems and methods | 22 | 2011 |
substrate transport apparatus with multiple movable arms utilizing a mechanical switch m… 🛈 | 21 | 2007 |
substrate processing apparatus with motors integral to chamber walls | 20 | 2007 |
device and method for removing a peelable seal | 19 | 2007 |
load lock fast pump vent | 19 | 2007 |