How many patents does
Tokyo Electron have?

patents
36,142
families
8,436
granted
11,595
applications
24,547
US
9,438
JP
7,688
KR
5,504
CN
4,358
WO
1,686
EP
717
GB
8
RoW
6,743

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The report contains ten-year analysis with the following sections

  • patent filing analysis
  • worldwide filing analysis
  • patent family analysis
  • application analysis
  • granted analysis
  • classification analysis
  • citation analysis

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Tokyo Electron
Top ten assignees appearing on patents

Tokyo Electron
The top ten patent families are

Title of patent family
(most common patent title)
Family
members
Filing
year
plasma processing apparatus and method 57 2004
plasma processing apparatus and plasma processing method 40 2009
amorphous silicon film formation method and amorphous silicon film formation apparatus 35 2010
coating and developing apparatus 30 2010
substrate carrying mechanism, substrate carrying method and recording medium storing pro… 🛈 30 2010
fluid storage and dispensing systems and processes 27 2005
use of topography to direct assembly of block copolymers in grapho-epitaxial applications 24 2013
autonomous biologically based learning tool 23 2008
liner-based liquid storage and dispensing systems with empty detection capability 21 2005
plasma processing method and plasma processing apparatus 20 2010