The report contains ten-year analysis with the following sections
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Title of patent family (most common patent title) |
Family members |
Filing year |
---|---|---|
plasma processing apparatus and method | 57 | 2004 |
plasma processing apparatus and plasma processing method | 40 | 2009 |
amorphous silicon film formation method and amorphous silicon film formation apparatus | 35 | 2010 |
coating and developing apparatus | 30 | 2010 |
substrate carrying mechanism, substrate carrying method and recording medium storing pro… 🛈 | 30 | 2010 |
fluid storage and dispensing systems and processes | 27 | 2005 |
use of topography to direct assembly of block copolymers in grapho-epitaxial applications | 24 | 2013 |
autonomous biologically based learning tool | 23 | 2008 |
liner-based liquid storage and dispensing systems with empty detection capability | 21 | 2005 |
plasma processing method and plasma processing apparatus | 20 | 2010 |